文件名称：声表面波器件用〈110〉取向ZnO薄膜的MOCVD生长 (2003年)
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自然科学 论文
ZnO films with 〈110〉 orientation were grown on R-Al2O3 substrates by LP-MOCVD, and the growth temperature was optimized. The quality of crystal, surface morphology and optical characteristic of the samples were investigated by XRD, AFM and PL method. The