Hetero-epitaxy of Lg=0.13-um metamorphic AlInAs/GaInAs HEMT on Si substrates by MOCVD for logic applications

【文件属性】：
文件名称：Hetero-epitaxy of Lg=0.13-um metamorphic AlInAs/GaInAs HEMT on Si substrates by MOCVD for logic applications
文件大小：1.87MB
文件格式：PDF
更新时间：2021-02-21 22:32:47
研究论文 Hetero-epitaxy of Lg=0.13-um metamorphic AlInAs/GaInAs HEMT on Si substrates by MOCVD for logic applications