plasma etching 4

时间:2012-05-25 15:22:32
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文件名称:plasma etching 4

文件大小:1.75MB

文件格式:PPT

更新时间:2012-05-25 15:22:32

plasma etching

Plasma processing. Advantages and disadvantages compared to wet etching. Lithography process. Overview of oxygen plasma etching. Qualitative description of Debye shielding. Description of glow discharge. Reactive ion etching versus plasma etching. RF matching.


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