文件名称：plasma etching 2
文件大小：557KB
文件格式：PPT
更新时间：2012-05-25 15:01:05
plasma etching
Plasma processing. Advantages and disadvantages compared to wet etching. Lithography process. Overview of oxygen plasma etching. Qualitative description of Debye shielding. Description of glow discharge. Reactive ion etching versus plasma etching. RF matching.