文件名称：Study on Manganin High Pressure Array Sensor (2003年)
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更新时间：2024-06-17 11:12:43
工程技术 论文
A new kind of thin film manganin aray gauge is fabricated by adopting a new sensor fabrication technique. The sensitive materials (manganin thin films) are first deposited by magnetron sputtering on fused silica substrates,and then covered by a layer of S