【文件属性】：
文件名称：Study on Manganin High Pressure Array Sensor (2003年)
文件大小：140KB
文件格式：PDF
更新时间：2021-05-28 17:26:03
工程技术 论文
A new kind of thin film manganin aray gauge is fabricated by adopting a new sensor fabrication technique. The sensitive materials (manganin thin films) are first deposited by magnetron sputtering on fused silica substrates,and then covered by a layer of S