文件名称：日立电子扫描电镜操作手册
文件大小：12.55MB
文件格式：PDF
更新时间：2023-08-28 16:18:40
HItachi CDSEM S9380 operator 半导体
The instruction manual for this product comprises the following five volumes; SYSTEM SECTION, OPERATING SECTION, WINDOW SECTION, ERROR MESSAGE SECTION, and MEASUREMENT/IMAGE FILE CONFIGURATION. This volume is the OPERATING SECTION for the CD Measurement and Evaluation SEM System. • The SYSTEM SECTION covers the installation requirements, arrangements of component parts of the instrument, functional features, operating principles, file organization, coordinate schemes, start/stop of instrument operation, troubleshooting, maintenance, safety precautions, etc. • The OPERATING SECTION presents the instrument operating procedures, file creating procedures, and optional function control procedures. • The WINDOW SECTION details the operational functions and procedures for windows displayed on the monitor. • The ERROR MESSAGE SECTION describes possible causes of error messages to be indicated on the workstation during operation of the instrument, together with remedial procedures to be taken. • The MEASUREMENT/IMAGE FILE CONFIGURATION explains the configuration of image and measurement files. • Before attempting operation of the instrument, read the SYSTEM SECTION first. Then, after you have acquired a basic knowledge concerning the instrument, proceed to the OPERATING SECTION and WINDOW SECTION. • The maintenance and checkup procedures for ensuring normal operation of the instrument are described in the SYSTEM SECTION. According to the periodic check list contained in the SYSTEM SECTION, carry out maintenance and inspection periodically as instructed. • This instruction manual contains some descriptions concerning plural instrument models, software versions and optional functions. Check your instrument model, software version and optional functions incorporated, and then read the relevant descriptions in the manual. • This instruction manual pertains to the following models of the S-9000 series CD SEMs; S-9200, S-9220, S-9260, S-9260A, S-9300, S-9360 and S-9380.