文件名称：论文研究-Diamond-like carbon deposition using microwave plasma chemical vapor deposition.pdf
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更新时间：2022-09-08 20:53:08
microwave plasma
Diamond-like carbon deposition using microwave plasma chemical vapor deposition，赖秀琼，陈俊芳，The spatial plasma density distribution in the reaction chamber of the quartz tube microwave plasma apparatus is diagnosed at p = 1.20 kpa, Pw = 440W by a Langmuir probe, obtaining