文件名称：Optical MEMS Nanophotonics and Their Applications 2018.pdf
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更新时间：2021-02-27 06:20:44
MEMS Optical Nano
2018 by Taylor & Francis Group, LLC This book aims to cover a broad spectrum and is divided into three sections. The first section addresses typical optical MEMS devices containing microsized features. It also features the use of this technology in imaging, communication, and sensing applications. This section presents a set of devices and systems, including PZT-driven micromirrors for ultra-portable laser scanning project displays, optical phased array technology using MEMS-driven high-contrast-grating (HCG) mirrors for fast beam steering, electrostatically driven programmable mirror arrays for space instruments, ultra-fast laser scanning using MEMS-driven vibratory gratings and their applications in hyperspectral imaging, MEMS-based tunable Fabry–Pérot filters, electrothermally driven micromirrors and their applications in endoscopes, and MEMS-driven tunable lenses and adjustable apertures for miniaturized cameras. The second section of the book covers the recent research in nanophotonics, again with an emphasis on its integration with NEMS/MEMS. This section reports on photonics crystal-based sensors, NEMS-driven silicon nanowire waveguide variable couplers, metasurfaces and ultrathin optical devices, sensors based on nanophotonic resonators, and MEMS tunable THz metameterials. The last section of the book presents particular types of micro- and nanophotonic devices that integrate with biological and/or microfluidic systems. This section reports optofluidic devices and their applications, implantable microphotonic devices, as well as portable microfluidic-based photocatalysis systems. These devices and systems are mostly targeted for biomedical and health care applications.