文件名称：HSMS SEMI E37标准英文版PDF
文件大小：110KB
文件格式：PDF
更新时间：2021-12-11 14:00:28
HSMS
HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.