文件名称：Experimental method for the extraction of intensity profiles by imaging the scattered pattern with a charge-coupled device
文件大小：522KB
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更新时间：2024-03-01 01:23:42
A practicable experimental method for measuring scattering on rough surfaces is reported. The scattered patterns are captured on a screen composed of two pieces of ground glass and then imaged using a charge-coupled device. The scattered intensity profiles are extracted by converting the patterns in real space into the wave vector space. Isotropic and anisotropic samples of the rough backsides of silicon wafer are investigated respectively, and their intensity profiles are measured. The profiles