【文件属性】：
文件名称：PolyMUMPs design handbook
文件大小：1.67MB
文件格式：PDF
更新时间：2012-09-18 18:21:38
mems
伯克利mems课程参考用书
Table of Contents
Chapter 1: Three-Layer Polysilicon Surface Micromachining Process
1.1 Introduction ...................................................................................................................................................................... 1
1.2 Process Overview............................................................................................................................................................. 2
Chapter 2: PolyMUMPs Design Guidelines and Rules
2.1 Introduction .................................................................................................................................................................... 11
2.2 Design Rules ................................................................................................................................................................... 12
2.3 Beyond the Design Rules................................................................................................................................................ 31
2.4 Film Parameters ............................................................................................................................................................. 36
2.5 EZ-PolyMUMPs Design Rules.......................................................................................................................................... 38
2.6 Layout Requirements ..................................................................................................................................................... 38
2.7 Die Reservation and Layout Submission........................................................................................................................ 39
2.8 Custom Dicing, Releasing and Critical Point Drying....................................................................................................... 39
2.9 Other Reference Material ............................................................................................................................................... 40