文件名称：Influence of substrate metals on the crystal growth of AlN films (2010年)
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更新时间：2024-05-12 02:18:35
工程技术 论文
AlN films were deposited by reactive radio frequency (RF) sputtering on various bottom electrodes,such as Al,Ti,Mo,Au/Ti,and Pt/Ti. The effects of substrate metals on the orientation of AlN thin films were investigated. The results of X-ray diffraction,at