文件名称：A novel wide-range precision instrument for measuring three-dimensional surface topography (2008年)
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更新时间：2024-05-13 01:08:49
自然科学 论文
We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson inte