文件名称：a MEMS-IDT gyroscope
文件大小：681KB
文件格式：PDF
更新时间：2013-01-02 04:13:10
Design and development of a
Thedesign,developmentandperformanceevaluationofanovelradiofrequency microelectromechanicalsystems(MEMS)gyroscope,basedonasurfaceacousticwave resonator(SAWR)andasurfaceacousticwavesensorispresentedinthispaper.Mostofthe MEMSgyroscopesbasedonsiliconvibratorystructuresthatutilizetheenergytransfer betweenthetwovibratorymodesdemandsmallfabricationtolerancestominimizesignal outputwhenthereisnorotation(i.e.zerorateoutput).This1cm × 1cmgyroscopeoperates basedontheprincipleofasurfaceacousticwave(SAW)onapiezoelectricsubstrate.The SAWRcreatesSAWstandingwaveswithinthecavityspacebetweentheinterdigital transducers(IDTs).Theparticlesattheanti-nodesofastandingwaveexperiencelarge amplitudesofvibrationperpendiculartotheplaneofthesubstrate,whichservesasthe referencevibratingmotionforthisgyroscope.