文件名称：SEMI E30 - 0200 半導體 通訊協定
文件大小：1.39MB
文件格式：PDF
更新时间：2015-11-08 10:06:22
SEMI SECS GEM
The Generic Equipment Model (GEM) Standard is published by Semiconductor Equipment and Materials International, Inc. (SEMI), and is identified as SEMI Standard E30.