MEMS accelerometer

时间:2017-01-11 17:10:07
【文件属性】:

文件名称:MEMS accelerometer

文件大小:1019KB

文件格式:PDF

更新时间:2017-01-11 17:10:07

加速度计

A monolithic capacitive triaxial accelerometer using a highly symmetric quad-beam structure with a single seismic mass is developed. The structure of the accelerometer is analysed in detail theoretically and numerically.


网友评论