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文件名称：光刻原理Principles of Lithography
文件大小：17.71MB
文件格式：PDF
更新时间：2018-06-14 17:34:45
光刻原理 litho
Lithographers at semiconductor companies are integrators. We combine optics,
precision machines, photochemicals, and photomasks into working processes.
While chip makers often get the glory, the lens makers, resist chemists, and
tool makers are the unsung heroes of the microelectronics revolution. It has also
been my good fortune to be able to interact with many of the world’s experts in
optics, equipment, and lithographic materials.