文件名称：SEMICONDUCTOR MATERIAL AND DEVICE
文件大小：11.36MB
文件格式：RAR
更新时间：2013-04-07 04:21:30
SEMICONDUCTOR
The resistivity ρ of a semiconductor is important for starting material as well as for semiconductor devices. Although carefully controlled during crystal growth, it is not truly uniform in the grown ingot due to variability during growth and segregation coefficients less than unity for the common dopant atoms. The resistivity of epitaxially grown layers is generally very uniform. Resistivity is important for devices because it contributes to the device series resistance, capacitance, threshold voltage, hot carrier degradation of MOS devices, latch up of CMOS circuits, and other parameters. The wafers resistivity is usually modified locally during device processing by diffusion and ion implantation, for example.